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Product Description£º
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Name
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PS-12U
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Performance
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Action target
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200mm SMIF Pod
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Repeat positioning accuracy
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ʿ0.1mm
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Switch box travel
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220mm
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Unboxing time
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13s
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Box closing time
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14s
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Blister pack inspection
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RFID reading, mapping, wafer probing detection, robot arm misentry detection, seat detection
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Overview
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Installation Type
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Desktop
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Cleanliness
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Class 1@0.1um
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Dimensions
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436Wx421Dx770H(mm£©
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Body weight
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35kg
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Factory Affairs
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Power supply
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Single-phaseAC220V,50/60Hz
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