|
Standard atmospheric wafer robot
|
RW-A000D Series Standard Atmospheric Wafer Robot
|
|
Both arms standard
|
High load on both arms
|
|
Performance
|
Itinerary
|
Z-axis
|
300/450/500mm
|
|
T-axis
|
0~340¡ã
|
|
R/W-axis
|
arm span£º156mm/190mm/260mm
|
|
Top speed
|
Z-axis
|
500mm/s
|
|
T-axis
|
260¡ã/s
|
240¡ã/s
|
|
R/W-axis
|
1100mm/s
|
750mm/s
|
|
Repeat positioning accuracy
|
Z-axis
|
¡À0.1mm
|
|
T-axis
|
¡À0.02¡ã
|
|
R/W-axis
|
¡À0.1mm
|
|
Overview
|
Control the number of axes
|
4 £¨Can be expanded up to 8£©
|
|
Cleanliness
|
Class 1@0.1um
|
|
Load
|
1.5kgf(Includes end effector)
|
4kgf (Includes end effector)
|
|
Installation Type
|
Top/Bottom (Installation)
|
|
Cable length (Robot-Controller)
|
3m(Standard)
|
|
Electric box size
|
435x300x155mm
|
|
I/O interface
|
8IN;8OUT
|
|
Factory Affairs
|
Power supply
|
Single-phaseAC220V,50/60Hz
|
|
Air source
|
Compressed air
|
greater than0.4~0.5MPa
|
|
Vacuum
|
less than-50~-70kPa
|
